Research status and development trend of silicon resonant MEMS accelerometer

The silicon resonant MEMS (Micro-Electro-Mechanical System) accelerometer offers several advantages, including small size, high precision, low power consumption, and strong anti-interference capabilities, making it a highly promising high-precision MEMS inertial instrument. It could be widely used in fields such as inertial navigation, seismic monitoring and gravity measurement. This review summarizes and analyses the latest research progress on silicon resonant MEMS accelerometers by major research institutions domestically and internationally, discusses the key technologies for optimizing the performance of these accelerometers, including structural design, process manufacturing, measurement and control circuit, and package technology, and finally provides an outlook on the future development directions of silicon resonant MEMS accelerometers.